| Monitoring system | Including temperature control, intensity detection |
| Cleaning system | Online mechanical cleaning (not included) |
| Ballast | Electronic ballast, adjustable power |
| Lamp type | Low pressure and high intensity |
| System characteristics | Low pressure and high intensity UV TOC digestion equipment |
| Electric control cabinet material | Carbon steel anti-corrosion/stainless steel 304/316 |
| Cavity material | Stainless steel 304/316 |
| Equipment power | 4-30kw |
| Processed water volume | 8-65m³/h |
Application of UV light in TOC digestion of ultrapure water in the electronics industry
The electronics industry—encompassing semiconductors, optoelectronics, components, and electronic manufacturing—is a cornerstone of the national economy. Electronic-grade ultrapure water (UPW) is critical here, widely used in semiconductor chip and LCD panel production (e.g., cleaning, reagent dilution, lithography, cooling) with high consumption.
Total Organic Carbon (TOC) in UPW directly impacts purity requirements for semiconductor cleaning, with key risks:
TOC may oxidize under certain conditions, corroding semiconductors and damaging structure/function.
Organic residues in water form micro-bubbles on products, impairing their structure.
UV Principle for TOC Removal in Ultrapure Water
Photolysis: UV photons interact with water molecules to generate highly oxidizing hydroxyl radicals (·OH), which oxidize organic matter.
Direct photolysis: High-energy photons break organic molecular chains, decomposing them.
Ionization: UV photons break organic chains, ionize them, and enable removal via subsequent ion exchange.
High efficiency: Effectively reduces TOC by removing organic matter.
Eco-friendly: No chemicals added, avoiding secondary pollution.
Stable operation: Continuous, long-term performance ensures consistent treatment.
Compact design: Small footprint, suitable for space-constrained environments.
| Low-pressure high-intensity ultraviolet TOC digestion equipment | |
| System characteristics | Low-pressure high-intensity ultraviolet TOC digestion equipment |
| Processed water volume | 8-65m³/h |
| Lamp type | Low-pressure high-intensity lamp |
| Equipment power | 4kw-30kw |
| Ballast | Electronic ballast, adjustable power |
| Cavity material | Stainless steel 304/316L |
| Cleaning system | Online mechanical cleaning (not included) |
| Electric control cabinet material | Carbon steel anti-corrosion/stainless steel 304/316L |
| Monitoring system | Including temperature control, strength detection |
Housing: Electropolished 316L stainless steel chamber, configurable for various flow rates. Optional flange orientations fit existing pipelines or narrow spaces.
UV lamps: High-efficiency, high-output lamps cut energy use, lowering operating costs while ensuring performance.
Control system: Monitors UV functions and safety status, triggering critical/non-critical alarms (critical alarms shut down lamps/drivers). 7" touchscreen HMI simplifies configuration and displays lamp status/parameters.
Modular installation: Rail-based modules stack for compactness, easy expansion, and reduced footprint.
Advanced control & predictive maintenance: User-friendly touchscreen interface monitors individual lamp health and predicts failures. Proactive lamp replacement reduces maintenance costs and downtime.
