| Processed water volume | 8-65m³/H |
| Monitoring system | Including temperature control, intensity detection |
| Cleaning system | Online mechanical cleaning (not included) |
| Ballast | Electronic ballast, adjustable power |
| Lamp type | Low voltage high intensity lamp |
| System characteristics | Low-pressure high-intensity ultraviolet TOC digestion equipment |
| Electric control cabinet material | Carbon steel anti-corrosion/stainless steel 304/316 |
| Chamber material | Stainless steel 304/316 |
| Equipment power | 4-30KW |
Application of UV light in TOC digestion of ultrapure water in chip industry
The electronics industry is a pillar industry for the development of the national economy, including five major sub-industries such as semiconductors, optical optoelectronics, components, electronic manufacturing, and other electronics. Among them, electronic grade ultrapure water (UPW) is a key production factor in the electronics industry. It is widely used in the preparation process of semiconductor chips and optical optoelectronic liquid crystal panels, such as product cleaning, agent dilution, photolithography system and cooling, and the usage is large. TOC affects the purity requirements of ultrapure water used by the semiconductor industry to clean semiconductor materials or electronic chips. There are the following more significant effects:
Total organic carbon residues on the product will cause the performance of semiconductor materials to deteriorate or fail;
Under certain conditions, total organic carbon will undergo oxidation reactions, causing oxidation and corrosion of semiconductor materials, damaging their structure and function
When total organic matter remains in water, it will form tiny bubbles or tiny gas groups attached to the surface of the product, damaging its structure and function
Photolysis: UV photons interact with water molecules to stimulate water molecules to generate highly oxidizing hydroxyl radicals (·OH), which can oxidize organic matter in water;
Direct photolysis: High-energy photons directly break the molecular chain of organic matter and decompose organic matter;
Ionization: UV photons break the molecular chain of organic matter, ionize it, and remove it through subsequent ion exchange;
High efficiency: UV TOC remover can efficiently remove organic matter in water and reduce TOC content.
Environmental protection: No chemical reagents need to be added during the treatment process, avoiding the risk of secondary pollution.
Stability: The equipment operates stably and can work continuously for a long time to ensure the treatment effect.
Small footprint: The equipment has a compact structure and a small footprint, which is suitable for installation and use in environments with limited space.
Housing.
The electropolished 316L stainless steel chamber is available in a variety of configurations for different flow rates. Optional flange orientation makes the chamber suitable for existing pipe laying corridors or narrow spaces.
UV lamps.
High-efficiency, high-output lamps are very energy-efficient, providing good system performance and reducing power consumption, thereby saving operating costs.
Control system.
The controller continuously monitors the UV system functions, including safety status. Critical and non-critical alarms are generated based on these safety status. Critical alarms shut down the UV lamp and driver. The intuitive 7" touch screen HMI allows the operator to easily configure various settings. The HMI screen displays the status of each lamp, including detailed parameters.
Modular installation.
The modular rail configuration allows multiple units to be stacked for compact and easily expandable functionality and reduced footprint.
Advanced control and predictive maintenance.
The operator interface with a touch screen is simple to use, easy to operate and monitor, capable of monitoring the health of individual lamps and predicting whether a lamp will fail. By proactively replacing lamps before failure, the general maintenance cost of the equipment can be reduced and downtime can be shortened.
| Low-pressure high-intensity ultraviolet TOC digestion equipment | |
| System characteristics | Low-pressure high-intensity ultraviolet TOC digestion equipment |
| Processed water volume | 8-65m³/h |
| Lamp type | Low-pressure high-intensity lamp |
| Equipment power | 4kw-30kw |
| Ballast | Electronic ballast, adjustable power |
| Cavity material | Stainless steel 304/316L |
| Cleaning system | Online mechanical cleaning (not included) |
| Electric control cabinet material | Carbon steel anti-corrosion/stainless steel 304/316L |
| Monitoring system | Including temperature control, strength detection |
