The electronics industry, a cornerstone of national economic development, comprises five major sub-sectors: semiconductors, optoelectronics, components, electronic manufacturing, and other electronics. Among these, electronic-grade ultrapure water (UPW) is a critical production resource, widely used in semiconductor chip and optoelectronic LCD panel manufacturing processes—such as product cleaning, reagent dilution, lithography systems, and cooling—with substantial consumption.

Total Organic Carbon (TOC) impacts the purity of ultrapure water used in cleaning semiconductor materials or electronic chips, with significant effects:

Residual TOC on products degrades semiconductor performance or leads to failure.

Under specific conditions, TOC undergoes oxidation, causing corrosion of semiconductor materials and damaging their structure and function.

Organic residues in water form micro-bubbles or gas clusters that adhere to product surfaces, impairing structure and function.

Principle of ultraviolet light to remove total organic carbon in ultrapure water

Ultraviolet TOC remover for semiconductor industry

Photolysis: UV photons interact with water molecules, stimulating the generation of highly oxidizing hydroxyl radicals (·OH) that oxidize organic matter in water.

Direct photolysis: High-energy photons directly break organic molecular chains, decomposing the organic matter.

Ionization: UV photons fragment organic molecular chains, ionizing them for removal via subsequent ion exchange.

Application and advantages of ultraviolet light to remove TOC in ultrapure water process

High efficiency: UV TOC removers effectively eliminate organic matter, reducing TOC levels.

Environmental friendliness: No chemical reagents are added, avoiding secondary pollution risks.

Stability: The equipment operates steadily, enabling long-term continuous operation to ensure consistent treatment results.

Compact size: With a space-saving design, it is suitable for installation in environments with limited space.

Ultraviolet TOC remover for semiconductor industry

Equipment Advantages

Housing: Electropolished 316L stainless steel chambers are available in multiple configurations to accommodate different flow rates. Optional flange orientations allow 适配 with existing pipeline corridors or narrow spaces.

UV lamps: High-efficiency, high-output lamps are energy-saving, ensuring strong system performance while reducing power consumption and operating costs.

Control system: The controller continuously monitors UV system functions and safety status, triggering critical and non-critical alarms. Critical alarms automatically shut down UV lamps and drivers. The intuitive 7-inch touchscreen HMI simplifies configuration and displays real-time status and detailed parameters of each lamp.

Modular installation.

The modular rail configuration allows multiple units to be stacked for compact and easily expandable functionality and reduced footprint.

Advanced control and predictive maintenance.

The operator interface with a touch screen is simple to use, easy to operate and monitor, capable of monitoring the health of individual lamps and predicting whether a lamp will fail. By proactively replacing lamps before failure, the general maintenance cost of the equipment can be reduced and downtime can be shortened.

Technical Parameters

Low-pressure high-intensity ultraviolet TOC digestion equipment
System characteristics	Low-pressure high-intensity ultraviolet TOC digestion equipment
Processed water volume	8-65m³/h
Lamp type	Low-pressure high-intensity lamp
Equipment power	4kw-30kw
Ballast	Electronic ballast, adjustable power
Cavity material	Stainless steel 304/316L
Cleaning system	Online mechanical cleaning (not included)
Electric control cabinet material	Carbon steel anti-corrosion/stainless steel 304/316L
Monitoring system	Including temperature control, strength detection

UV TOC Remover for Chip Industry