Ultraviolet TOC remover for semiconductor industry

Monitoring system	Including temperature control, intensity detection
Cleaning system	Online mechanical cleaning (not included)
Ballast	Electronic ballast, adjustable power
Lamp type	Low pressure and high intensity
System characteristics	Low pressure and high intensity UV TOC digestion equipment
Electric control cabinet material	Carbon steel anti-corrosion/stainless steel 304/316
Cavity material	Stainless steel 304/316
Equipment power	4-30kw
Processed water volume	8-65m³/H

Product Details

Application of ultraviolet light in TOC digestion of ultrapure water in semiconductor industry

The electronics industry—including semiconductors, optoelectronics, etc.—relies on electronic-grade ultrapure water (UPW) for chip/LCD production (cleaning, dilution, lithography, cooling). TOC in UPW harms semiconductors:

Residues degrade performance or cause failure.

Oxidation leads to material corrosion, damaging structure/function.

Organic residues form micro-bubbles on products, impairing them.

Principle of ultraviolet light to remove total organic carbon in ultrapure water

Ultraviolet TOC remover for semiconductor industry

Photolysis: UV generates hydroxyl radicals (·OH) to oxidize organics.

Direct photolysis: High-energy UV breaks organic molecular chains.

Ionization: UV fragments and ionizes organics for removal via ion exchange.

Application and advantages of ultraviolet light to remove TOC in ultrapure water process

High efficiency: UV TOC remover can efficiently remove organic matter in water and reduce TOC content.

Environmental protection: No chemical reagents need to be added during the treatment process, avoiding the risk of secondary pollution.

Stability: The equipment operates stably and can work continuously for a long time to ensure the treatment effect.

Small footprint: The equipment has a compact structure and a small footprint, which is suitable for installation and use in environments with limited space.

Ultraviolet TOC remover for semiconductor industry

Equipment Advantages

Housing: Electropolished 316L stainless steel, configurable for flow rates; optional flanges fit tight spaces.

Lamps: High-efficiency, energy-saving, cutting operating costs.

Control: 7" touchscreen HMI monitors system/safety, triggers alarms; displays lamp status.

Modular installation: Stackable units for compactness and expandability.

Maintenance: Predictive monitoring of lamp health reduces costs and downtime.

Technical Parameters

Low-pressure high-intensity ultraviolet TOC digestion equipment
System characteristics	Low-pressure high-intensity ultraviolet TOC digestion equipment
Processed water volume	8-65m³/h
Lamp type	Low-pressure high-intensity lamp
Equipment power	4kw-30kw
Ballast	Electronic ballast, adjustable power
Cavity material	Stainless steel 304/316L
Cleaning system	Online mechanical cleaning (not included)
Electric control cabinet material	Carbon steel anti-corrosion/stainless steel 304/316L
Monitoring system	Including temperature control, strength detection